JPS62197848U - - Google Patents
Info
- Publication number
- JPS62197848U JPS62197848U JP8670786U JP8670786U JPS62197848U JP S62197848 U JPS62197848 U JP S62197848U JP 8670786 U JP8670786 U JP 8670786U JP 8670786 U JP8670786 U JP 8670786U JP S62197848 U JPS62197848 U JP S62197848U
- Authority
- JP
- Japan
- Prior art keywords
- waveguide
- generation chamber
- plasma generation
- microwave inlet
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005284 excitation Effects 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 239000010453 quartz Substances 0.000 claims 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8670786U JPS62197848U (en]) | 1986-06-06 | 1986-06-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8670786U JPS62197848U (en]) | 1986-06-06 | 1986-06-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62197848U true JPS62197848U (en]) | 1987-12-16 |
Family
ID=30943263
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8670786U Pending JPS62197848U (en]) | 1986-06-06 | 1986-06-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62197848U (en]) |
-
1986
- 1986-06-06 JP JP8670786U patent/JPS62197848U/ja active Pending